Available Beams

Typical cross section of the beam spot for IBA beamline: 0.8 cm X 0.8 cm.

Typical cross section of beam spot for Implantation beamline: 10 cm x 10 cm (Beam uniforminty can be adjusted using raster scanner).

Ion species Energy (charge state 1+) Beam current Ion Source
1H (p) 0.8 - 3.4 MeV 1-1000 nA RF Alphatross, SNICS
2H (d) 0.8 - 3.4 MeV 1-1000 nA RF Alphatross
4He (α) 0.8 - 3.4 MeV 1-100 nA RF Alphatross
6,7Li 0.8 - 3.4 MeV 1-1000 nA SNICS
10B 0.8 - 3.4 MeV 1-1000 nA SNICS
12,13C 0.8 - 3.4 MeV 1-1000 nA SNICS
14,15N 0.8 - 3.4 MeV 1-1000 nA SNICS, RF Alphatross
16,18O 0.8 - 3.4 MeV 1-1000 nA SNICS
27Al 0.8 - 3.4 MeV 1-1000 nA SNICS
28-30Si(mixed) 0.8 - 3.4 MeV 1-1000 nA SNICS
46-50Ti(mixed) 0.8 - 3.4 MeV 1-1000 nA SNICS
52Cr 0.8 - 3.4 MeV 1-1000 nA SNICS
59Co 0.8 - 3.4 MeV 1-1000 nA SNICS
56Fe 0.8 - 3.4 MeV 1-1000 nA SNICS
58Ni 0.8 - 3.4 MeV 1-1000 nA SNICS
63Cu 0.8 - 3.4 MeV 1-1000 nA SNICS
64Zn 0.8 - 3.4 MeV 1-1000 nA SNICS
107,109Ag 0.8 - 3.4 MeV 1-1000 nA SNICS
104-106,108,110Pd(mixed) 0.8 - 3.4 MeV 1-1000 nA SNICS
197Au 0.8 - 3.4 MeV 1-1000 nA SNICS
Others (On request) 0.8 - 3.4 MeV 1-1000 nA SNICS