Available Beams
Typical cross section of the beam spot for IBA beamline: 0.8 cm X 0.8 cm.
Typical cross section of beam spot for Implantation beamline: 10 cm x 10 cm (Beam uniforminty can be adjusted using raster scanner).
Ion species | Energy (charge state 1+) | Beam current | Ion Source |
---|---|---|---|
1H (p) | 0.8 - 3.4 MeV | 1-2000 nA | RF Alphatross, SNICS |
2H (d) | 0.8 - 3.4 MeV | 1-2000 nA | RF Alphatross |
4He (α) | 0.8 - 3.4 MeV | 1-200 nA | RF Alphatross |
6,7Li | 0.8 - 3.4 MeV | 1-2000 nA | SNICS |
10B | 0.8 - 3.4 MeV | 1-2000 nA | SNICS |
12,13C | 0.8 - 3.4 MeV | 1-2000 nA | SNICS |
14,15N | 0.8 - 3.4 MeV | 1-2000 nA | SNICS, RF Alphatross |
16,18O | 0.8 - 3.4 MeV | 1-2000 nA | SNICS |
27Al | 0.8 - 3.4 MeV | 1-2000 nA | SNICS |
28-30Si(mixed) | 0.8 - 3.4 MeV | 1-2000 nA | SNICS |
46-50Ti(mixed) | 0.8 - 3.4 MeV | 1-2000 nA | SNICS |
52Cr | 0.8 - 3.4 MeV | 1-2000 nA | SNICS |
59Co | 0.8 - 3.4 MeV | 1-2000 nA | SNICS |
56Fe | 0.8 - 3.4 MeV | 1-2000 nA | SNICS |
58Ni | 0.8 - 3.4 MeV | 1-2000 nA | SNICS |
63Cu | 0.8 - 3.4 MeV | 1-2000 nA | SNICS |
64Zn | 0.8 - 3.4 MeV | 1-2000 nA | SNICS |
107,109Ag | 0.8 - 3.4 MeV | 1-2000 nA | SNICS |
104-106,108,110Pd(mixed) | 0.8 - 3.4 MeV | 1-2000 nA | SNICS |
197Au | 0.8 - 3.4 MeV | 1-2000 nA | SNICS |
Others (On request) | 0.8 - 3.4 MeV | 1-2000 nA | SNICS |