Available Beams

Apr 27, 2019

Typical cross section of the beam spot for IBA beamline: 0.8 cm X 0.8 cm.

Typical cross section of beam spot for Implantation beamline: 10 cm x 10 cm (Beam uniforminty can be adjusted using raster scanner).

Ion speciesEnergy (charge state 1+)Beam currentIon Source
1H (p)0.8 - 3.4 MeV1-2000 nARF Alphatross, SNICS
2H (d)0.8 - 3.4 MeV1-2000 nARF Alphatross
4He (α)0.8 - 3.4 MeV1-200 nARF Alphatross
6,7Li0.8 - 3.4 MeV1-2000 nASNICS
10B0.8 - 3.4 MeV1-2000 nASNICS
12,13C0.8 - 3.4 MeV1-2000 nASNICS
14,15N0.8 - 3.4 MeV1-2000 nASNICS, RF Alphatross
16,18O0.8 - 3.4 MeV1-2000 nASNICS
27Al0.8 - 3.4 MeV1-2000 nASNICS
28-30Si(mixed)0.8 - 3.4 MeV1-2000 nASNICS
46-50Ti(mixed)0.8 - 3.4 MeV1-2000 nASNICS
52Cr0.8 - 3.4 MeV1-2000 nASNICS
59Co0.8 - 3.4 MeV1-2000 nASNICS
56Fe0.8 - 3.4 MeV1-2000 nASNICS
58Ni0.8 - 3.4 MeV1-2000 nASNICS
63Cu0.8 - 3.4 MeV1-2000 nASNICS
64Zn0.8 - 3.4 MeV1-2000 nASNICS
107,109Ag0.8 - 3.4 MeV1-2000 nASNICS
104-106,108,110Pd(mixed)0.8 - 3.4 MeV1-2000 nASNICS
197Au0.8 - 3.4 MeV1-2000 nASNICS
Others (On request)0.8 - 3.4 MeV1-2000 nASNICS
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