Research and Applications
The NEC ion beam analysis (IBA) endstation, model RC43, provides a complete IBA system offering automatic unattended data collection and can perform qualitative analysis using multiple techniques such as RBS, ERD, NRA and PIXE simultaneously.
Apr 27, 2019
The Implant Endstation is a manual single wafer handler. The chamber is designed to ensure accurate dose monitoring with uniform deposition.
Mar 27, 2019